陆静

陆静 2014-02-27

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个人简介:

陆静,女,1981.12,教授,博士生导师


研究方向:

半导体晶圆衬底超精密加工

智能制造新型磨抛工具的研发


研究领域:

纳米材料的表面修饰改性及应用

超精密磨抛工具中结合剂与磨料的界面结合


工作学习经历:

1999.9-2003.7 燕山大学材料学院无机非金属材料系超硬材料专业,获学士学位

2003.9-2009.5 亚稳材料制备技术与科学国家重点实验室(燕山大学)材料学专业,获博士学位

2009.08-2013.12 华侨大学机电及自动化学院 讲师

2014.01-2017.12 华侨大学制造工程研究院 副教授

2014.12-2015.12美国德州大学达拉斯分校 访问学者

2017.12 至今   华侨大学制造工程研究院 教授


主持或参与的科研项目:

1.国家自然科学基金青年项目,面向单晶SiC基片的单分散纳米金刚石半固结超精密加工技术研究,2012.01-2014.12,26万,主持。

2.国家自然科学基金面上项目,硬核软壳纳米复合磨粒的半固结柔性加工技术基础研究,2015.01-2018.12,80万,主持。

3.福建省科技计划项目,基于损伤检测的蓝宝石晶圆抛光技术研究,2018.04-2021.03,主持。

4.厦门市科技计划项目,单晶碳化硅晶圆高效超精抛光技术研究,2017.03-2020.03,20万,主持。

5.福建省高等学校新世纪优秀人才支持计划,金刚石晶圆的混合磨料半固结柔性抛光技术基础研究,2018.06-2020.07,6万,主持。

6.国家自然科学基金重点项目,晶圆级单晶金刚石衬底的活性/硬质磨粒协同加工原理与关键技术研究,2018.01-2022.12,300万,参与。


主要学术成果:

在国内外高水平刊物发表SCI收录学术论文82篇,申报专利26项、美日韩国际专利各2项,授权发明专利6项、实用新型专利4项、PCT1项、美国专利1项。2018年获福建省自然科学优秀学术论文一等奖。受聘晶安光电技术顾问,芯光润泽外聘专家,宽禁带半导体材料制备山西省重点实验室外聘专家。2018年获福建省教学成果奖一等奖,2018年获全国“互联网+”大学生创新创业大赛铜奖和福建省“互联网+”大学生创新创业大赛优秀指导老师。


发表论文:

1. Jianbing Zang, Jing Lu, Xuehai Qi, Yanhui Wang*. Characterization of silicon films grown by atomic layer deposition on nanocrystalline diamond. Diamond and related materials, 2006, 15(9): 1434-1437. (SCI, WOS: 000240047300039, IF:2.561)

2. Jing Lu, Yanhui Wang, Jianbing Zang*, Y.N. Li. Protective silicon coating for nanodiamonds using atomic layer deposition. Applied surface science, 2007, 253(7): 3485-3488.(SCI, WOS:000244381700022, IF=3.387)

3. Jing Lu, JianBing Zang, Shan S X, H. Huan, Yanhui Wang*. Synthesis and characterization of core− shell structural MWNT− zirconia nanocomposites. Nano letters, 2008, 8(11): 4070-4074.(SCI, WOS: 000260888600092, IF=12.712)

4. Jianbing Zang, Jing Lu, Yanghui Wang, Jinhui Zhang, X.Z. Cheng, H. Huang. Fabrication of core–shell structured MWCNT–Ti(TiC) using a one-pot reaction from a mixture of TiCl3, TiH2, and MWCNTs. Carbon, 2010, 48(13): 3802-3806. (SCI, WOS: 000281190800018, IF= 6.337)

5. 陆静, 罗求发, 宋运运, 胡光球,徐西鹏. 凝胶结合剂超细金刚石磨粒工具的制备及应用. 机械工程学报, 2015, 51(15):205-212. (EI,Accession number: 20153701258946)

6. Jing Lu, Yang Li, Xipeng Xu*. The effects of abrasive yielding on the polishing of SiC wafers using asemi-fixed flexible pad. Proceedings of the Institution of Mechanical Engineers Part B-Journal of Engineering Manufacture, 2015, Vol. 229(S1) 170-177. (SCI, WOS: 000352579400013, IF=1.366)

7. Yang Li, Jing Lu*, and Xipeng Xu. Phase transformation of monocrystalline silicon induced by polishing with diamond abrasives. IEEE Transactions on Semiconductor Manufacturing, 2015, 28(2): 153-159. (SCI, WOS: 00035418940000, IF=1.117)

8. Jing Lu*, Jianbing Zang, Yanhui Wang, Yongchao Xu, Xipeng Xu. Preparation and characterization of zirconia-coated nanodiamonds as a Pt catalyst support for methanol electro-oxidation. Nanomaterials, 2016, 6: 234. (SCI, WOS: 000392240000013, IF=3.553)

9. Qiufa Luo, Jing Lu*, Xipeng Xu. A comparative study on the material removal mechanisms of 6H-SiC polished by semi-fixed and fixed diamond abrasive tools. Wear, 2016, 350-351: 99-106. (SCI, WOS: 000370535900013, IF=2.531)

10. Yongchao Xu, Jing Lu*, Xipeng Xu. Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing. Applied Surface Science, 2016, 389: 713-720. (SCI, WOS: 000384577600087, IF=3.387)

11. Qiufa Luo, Jing Lu*, Xipeng Xu. Study on the processing characteristics of SiC and sapphire substrates polished by semi-fixed and fixed abrasive tools. Tribology International, 2016, 104: 191-203. (SCI, WOS: 000386186500019, IF=2.903)

12. Jing Lu*, Qiufa Luo, Xianyan Mao, Xipeng Xu, Yanhui Wang, Hua Guo. Fabrication of a resin-bonded ultra-fine diamond abrasive polishing tool by electrophoretic co-deposition for SiC processing. Precision Engineering, 2017, 47: 353-361. (SCI, WOS: 000389090200035, IF=2.237)

13. Jing Lu*, Yaguang Wang, Qiufa Luo, Xipeng Xu. Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO2-coated diamond abrasive. Precision Engineering, 2017, 49: 235-242. (SCI, WOS: 000402444000024, IF=2.237 )

14. Jing Lu*, Yongchao Xu, Yunhe Zhang, Xipeng Xu. The effects of SiO2 coating on diamond abrasives in sol-gel tool for SiC substrate polishing. Diamond and Related Materials, 2017, 76: 123-131. (SCI, WOS: 000403858500019, IF=2.561)(51475175, 20133501130001, ZQN-YX202).

15. Jing Lu*, Yongchao Xu, Dayu Zhang, Xipeng Xu. The synthesis of the core/shell structured diamond/akageneite hybrid particles with enhanced polishing performance. Materials, 2017, 10: 673. (SCI, WOS: 000404415000107, IF=2.654)

16. Qiufa Luo, Jing Lu*, Xipeng Xu, Feng Jiang. Removal mechanism of sapphire substrates (0001, 11-20 and 10-10) in mechanical planarization machining. Ceramics International, 2017, 43: 16178-16184. (SCI, WOS:000414106600020,IF=2.986 )

17. Jing Lu, Qiufa Luo, Xipeng Xu, Hui Huang, Feng Jiang. Removal mechanism of 4H- and 6H-SiC substrates (0001 and 000-1) in mechanical planarization machining. Proceedings of the Institution of Mechanical Engineers Part B-Journal of Engineering Manufacture, 2019, 233(1) 69-76.


联系方式:

手机:13055510552

Email:lujing26@hqu.edu.cn


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